Excimer irradiation device, tube type
Generates vacuum ultraviolet light with a wavelength higher in energy than conventional mercury lamps!
The excimer irradiation device from Quark Technology Co., Ltd. generates excited oxygen atoms necessary for organic cleaning and surface modification using a high photon energy vacuum ultraviolet light source from excimer lamps. It is utilized in various devices, including semiconductor manufacturing equipment and film surface modification systems. It has good energy conversion efficiency with quasi-monochromatic light, and relatively little unwanted visible and infrared light compared to other discharge lamps, which prevents thermal damage to the workpiece. Additionally, it can instantaneously turn on and off without damaging the excimer lamp. Moreover, high-efficiency cleaning allows for irradiation during conveyor transport. We also offer flat types of excimer irradiation devices with different features, so please choose according to your application. 【Features】 ■ Quasi-monochromatic light ■ Wavelength 172nm ■ Instantaneous on/off ■ Irradiation during conveyor transport is possible ■ Reduced number of lamps, no auxiliary equipment required *For more details, please refer to the catalog or feel free to contact us.
- Company：クォークテクノロジー
- Price：Other
